ULVAC, Solution for Deposition / Etching / Ashing / Implant / Vacuum Products.
Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment; Etching; Stripping; Ashing - Dry and Wet Equipment; Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.); Silicon on Insulator (SOI); Silicon on Sapphire (SOS); Silicon Carbide
Applications: Power Electronics and Energy Technology (PE)
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