Experience the ultimate product range for total fab solutions!

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Pfeiffer Vacuum provides turbopumps, dry pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we provide low vibration vacuum solutions. Additionally, we offer leak detectors and solutions for Airborne Contamination Management (AMC).Pfeifer Vacuum Valves & Engineering manufactures flanges, valves, fittings and chambers as well as custom components.Pfeiffer Vacuum is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions.