Production solutions for wafer and WBG material processing

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centrotherm is one of the leading developers and manufacturers of production equipment for various semiconductor technologies and applications, such as MEMS or sensor technology, WBG power semi- conductors, logic and memory devices or LED. It has an outstanding reputation in the field of 150 mm SiC processing. The centrotherm product portfolio comprises horizontal (up to 300 mm wafer diameter) and vertical batch furnaces (atmospheric or vacuum processes), high temperature furnaces (annealing up to 2000°C, oxidation up to 1500°C), single wafer systems (RTP, low-temperature microwave oxidation). For the microelectronics industry we offer vacuum soldering systems and conveyor furnaces for DCB, LTCC und MLCC.